- synchrotron lithography
- Микроэлектроника: литография с использованием синхротронного излучения
Универсальный англо-русский словарь. Академик.ру. 2011.
synchrotron lithography
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X-ray lithography — is a next generation lithography that has been developed for the semiconductor industryref|vlad. Batches of microprocessors have already been produced. The short wavelengths of 0.8 nm X rays overcome diffraction limits in the resolution of… … Wikipedia
Interference lithography — (or holographic lithography) is a technique for patterning regular arrays of fine features, without the use of complex optical systems or photomasks. Basic principleThe basic principle is the same as in interferometry or holography. An… … Wikipedia
National Synchrotron Radiation Research Center — The National Synchrotron Radiation Research Center (NSRRC) is a 1.5 GeV third generation synchrotron, in the Hsinchu Science Park about 70 km from Taipei in Taiwan. There are twenty six operational beamlines [1] and four under… … Wikipedia
DESY — Sign at the entrance of DESY in Hamburg. The DESY (Deutsches Elektronen Synchrotron, German Electron Synchrotron ) is the biggest German research center for particle physics, with sites in Hamburg and Zeuthen. DESY s main purposes are fundamental … Wikipedia
Electron — For other uses, see Electron (disambiguation). Electron Experiments with a Crookes tube first demonstrated the particle nature of electrons. In this illustration, the profile of the cross shaped target is projected against the tube face at right… … Wikipedia
LIGA — LIGA, a German acronym for ″Lithographie, Galvanoformung, Abformung, in English (X ray) Lithography, Electroplating, and Molding, is a process in microtechnology that was developed in the early 1980s [Becker EW et al, Production of Separation… … Wikipedia
LIGA-Technik — Das deutsche Akronym LIGA oder LiGA (steht für die Verfahrensschritte: Lithographie, Galvanik und Abformung) bezeichnet ein Verfahren welches auf einer Kombination von Tiefenlithographie, Galvanik und Mikroabformung basiert. Das LIGA Verfahren… … Deutsch Wikipedia
Électron — Traduction à relire Electron → … Wikipédia en Français
LIGA — Das deutsche Akronym LIGA oder LiGA (steht für die Verfahrensschritte: Lithographie, Galvanik und Abformung) bezeichnet ein Verfahren, welches auf einer Kombination von Tiefenfotolithographie, Galvanik und Mikroabformung basiert. Das LIGA… … Deutsch Wikipedia
National Institute of Standards and Technology — NIST redirects here. For other uses, see NIST (disambiguation). National Institute of Standards and Technology Agency overview Headquarters Gaithersburg, Maryland … Wikipedia
Extreme ultraviolet — Extreme Ultra Violet radiation (EUV) is generally considered to be the part of the electromagnetic spectrum spanning from 120 nm down to 10 nm. Its main uses are photoelectron spectroscopy, solar imaging, and lithography. EUV is naturally… … Wikipedia
